Polytec MSA-600: Micro System Analyzer

รหัสสินค้า : Polytec MSA-600

Download Technical Datasheet

For more information contact : Nattapon Panaim Tel. 09-9331-4114

* Warranty 1 year. (Machine only) * Please check prices again.

Measuring dynamic response and topography of MEMS and microstructures

Surface topography and dynamic motion analysis and visualization are key to testing and developing microstructures such as MEMS devices (Micro-Electro-Mechanical Systems). They are indispensable for validating FE calculations, determining cross-talk effects and measuring surface deformation. The MSA-600 Micro System Analyzer is the all-in-one optical measurement workstation for characterizing surface topography as well as in-plane and out-of-plane motions.

The versions MSA-600-M/V cover frequency ranges up to 25 MHz, ideally suited for MEMS, MEMS microphones and other microsystems. The versions MSA-600-X/U cover the high and very high frequency range up to 2.5 GHz, perfect for the assessment of HF MEMS resonators, micro-acoustic devices like SAW, BAW and more.

PREMIERE:

The MSA-600-S is the specialized optical measurement workstation designed for 8 GHz real-time vibration analysis and surface topography analysis. Ideal for testing GHz MEMS like FBAR (film bulk acoustic resonators), BAW (bulk acoustic wave) filters and SAW (surface acoustic wave) devices.

Highlights

• All-in-one optical measurement workstation for microstructures
• Real-time response measurement (no post-processing required)
• Versions MSA-600-M/V with up to 25 MHz
• Versions MSA-600-X/U with up to 2.5 GHz
• NEW MSA-600-S with up to 8 GHz
• Unparalleled sub-pm displacement resolution
• Fast measurement and visualization of deflection shapes
• Straightforward and intuitive operation
• Automated system for easy integration into probe stations
• Import / export options for FE model validation